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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Charge neutralization of the substrate surface during direct ion beam deposition
 Kejík, Lukáš ; Bábor, Petr (referee) ; Voborný, Stanislav (advisor)
Bachelor's thesis deals with possibilities of substrate neutralisation during ion beam deposition. There were designed and tested three sample holders with integrated neutralization filament. Depositions of gallium nitride were done on samples with all configurations, then analyzed by XPS. In this thesis the suitability of all configuration was evaluated and discussed.
Detailed record
Charge neutralization of the substrate surface during direct ion beam deposition
 Kejík, Lukáš ; Bábor, Petr (referee) ; Voborný, Stanislav (advisor)
Bachelor's thesis deals with possibilities of substrate neutralisation during ion beam deposition. There were designed and tested three sample holders with integrated neutralization filament. Depositions of gallium nitride were done on samples with all configurations, then analyzed by XPS. In this thesis the suitability of all configuration was evaluated and discussed.
Detailed record

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